基于微环辅助的M-Z温度传感器

针对普通马赫-曾德尔(M-Z)滤波器为了获得良好的滤波性能需要mm量级的臂长差的问题,文章提出了一种基于微环辅助M-Z滤波原理的温度传感器,其具有μm量级的尺寸。在M-Z滤波器的一个臂上耦合一个液体微环腔,利用微流控技术将一些温敏液体注入腔内,通过分析传感器的输出光谱,可以检测到温度的变化。实验结果表明,该传感器具有良好的滤波性能及温度分辨能力,消光比>10 dB,3 dB带宽<1 nm,温度检测分辨率可达到0.1℃。此外,通过改变微环中液体的种类,可以调节传感器的温度检测范围。

Temperature Sensor with Mach-Zehnder Filter Assisted by a Micro-Ring

In this paper, a micro-ring-assisted Mach-Zehnder(M-Z) temperature sensor within micron size is proposed. A liquid micro-ring cavity is coupled to one arm of the M-Z interferometer, and the temperature-sensitive liquid is injected into the cavity based on the microfluidic technique. The temperature change can be detected by analyzing the output spectrum of the sensor. In order to obtain good filtering performances, the arm-length difference of ordinary M-Z filter is usually in the order of millimeters. The arm-length difference of the temperature sensor presented in this paper is only μm micron order. The results show that the proposed sensor has good filtering performances and a temperature resolution. The extinction ratio is more than 10 dB, with 3 dB bandwidth less than 1 nm. The resolution of temperature detection is 0.1 ℃. In addition, the temperature detection range of the sensor can be adjusted by changing the type of liquid in the micro-ring.