生长时间对纳米金刚石薄膜微结构的影响

文章研究了不同沉积时间下制备的不同厚度纳米金刚石薄膜的微观结构和相组成。采用热丝化学气相沉积法分别制备了沉积时间为52、67、97和127min的纳米金刚石薄膜。采用扫描电子显微镜和拉曼光谱表征薄膜的微观结构和相组成。结果表明,纳米金刚石薄膜表面颗粒尺寸大小无明显变化,约为50nm。随着生长时间增加,金刚石相含量保持稳定没有明显的增加或减小趋势,石墨相有序度以及石墨团簇尺寸随着生长时间增加而增加。

The Influences of Growth Time on the Microstructure of Nanocrystalline Diamond Film

The microstructure and the phase composition of nanocrystalline diamond films of different thickness prepared under different deposition time has been studied in this article.Nanocrystalline diamond films under different deposition time of 52,67,97 and 127min have been prepared respectively by hot filament chemical vapor deposition（HFCVD）.The microstructure and the phase composition of nanocrystalline diamond film were represented by scan electronic microscope（SEM）and Raman spectrum.The result shows that the particle size of the nanocrystalline diamond film surface has no marked change,which is about 50 nm.As the growth time increases,the diamond phase content remains stable without obvious increase or decrease.The order degree of graphite phase and cluster size of graphite increase as the growth time increases.