| 窄带滤光片光学极值法直接监控的光学设计 |
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| 引用本文： | 杨聚庆,弥谦. 窄带滤光片光学极值法直接监控的光学设计[J]. 西安工业大学学报, 2008, 28(4) |
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| 作者姓名： | 杨聚庆 弥谦 |
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| 作者单位： | 河南工业职业技术学院电气工程系，西安工业大学光电工程学院 |
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| 基金项目： | 陕西省薄膜技术与光学检测重点实验室基金 |
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| 摘 要： | 窄带滤光片是应用于光谱学、激光、天文物理学、通信等各个领域的光学组件,精确控制每一层膜厚是制备滤光片的困难所在.采用光学极值法直接监控工件,可以同时制备多件滤光片.设计了监控光路和信号获得电路,通过探测到的测试信号,监控薄膜膜厚,实现了直接监控.
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| 关 键 词： | 窄带滤光片 光学极值法 光学设计 直接监控 |
Optical Design of Direct Monitoring System of Film Thickness Narrow Band-pass Filter Using Optical Extreme Value |
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| YANG Ju-qing,MI Qian. Optical Design of Direct Monitoring System of Film Thickness Narrow Band-pass Filter Using Optical Extreme Value[J]. Journal of Xi'an Institute of Technology, 2008, 28(4) |
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| Authors: | YANG Ju-qing MI Qian |
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| Abstract: | Narrow band-pass filter,as a general optical component,was applied widely in spectroscopy,laser,communication and astrophysics.It is difficult to monitor accurately each layer thickness of filter.Direct photoelectric extreme method was applied to monitor substrate,corresponding optical system structure and optical parameters were designed.Each-layer thickness could be calculated from the useful qusi-square optical single. |
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| Keywords: | narrow band-pass filter optical extreme value method optical designing direct monitor |
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