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X射线荧光法测试镀银铜线镀层厚度
引用本文:张瑾,马磊.X射线荧光法测试镀银铜线镀层厚度[J].现代科学仪器,2005(3):60-62.
作者姓名:张瑾  马磊
作者单位:中国电子科技集团公司第二十三研究所检测中心,上海,200437
摘    要:结合X射线荧光法厚度测定仪FISCHERSCOPE—RAY XUL,介绍了X射线荧光法测定镀层厚度的基本原理及仪器流程结构,并应用该方法对不同镀银铜线进行了镀层厚度测试,结果表明该方法测试重复性好,精密度高。同时本方法同经典的称重法的比较结果显示,该方法准度高,结果准确可靠。

关 键 词:X射线荧光法  镀层厚度  测厚仪  镀银铜线
修稿时间:2004年11月23

Determination of Ag-coated Copper Wire Layer Thickness by X-Ray Fluorescence Method
Zhang Jin,Ma Lei.Determination of Ag-coated Copper Wire Layer Thickness by X-Ray Fluorescence Method[J].Modern Scientific Instruments,2005(3):60-62.
Authors:Zhang Jin  Ma Lei
Abstract:Function principle of determination coating thickness by X-Ray fluorescence method and instrument flow chart were introduced based on FISCHERSCOPE R X-RAY XUL. And different Ag -coated copper wire coating thickness were measured through XRF method with FISCHERSCOPE R X-RAY XUL. The tested results showed that XRF method could ensure satisfying repeatability and precision . In addition, accuracy comparison based on XRF method and weighing method for different samples proved that X-Ray fluorescence method could gain high accuracy in the course of determination of Ag coated copper wire layer thickness
Keywords:XRF method  Coating thickness  Thickness measurement instrument  Ag -coated copper wire
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