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一种高深宽比微细槽的电火花加工工艺
引用本文:崔晶, 李勇, 熊英. 一种高深宽比微细槽的电火花加工工艺[J]. 北京工业大学学报, 2010, 36(3): 289-293.
作者姓名:崔晶  李勇  熊英
作者单位:北京工业大学机械工程与应用电子技术学院,北京,100124;清华大学精密仪器与机械学系,北京,100084
摘    要:为实现高深宽比微槽的加工,提出了一种自成形和扫描加工相结合的微细扁平电极制作及微细槽加工的工艺方法.采用棒状毛坯电极在一平板试件上扫描加工出一定长度的通槽,将毛坯电极沿垂直通槽方向向左和右偏移,两侧分别进行电火花反拷加工,得到扁平微细电极.再采用该扁平电极在线进行扫描加工即可得到期望的微细槽.实验获得了深径比大于18及尺寸一致性较高的阵列微细槽.与反拷或线电极磨削得到微细电极相比,自成形电极方法降低安装精度要求.而采用扁平电极进行微深槽的微细电火花加工,相对提高电极截面面积,降低电极损耗率,有利于提高加工效率.

关 键 词:电火花加工  微细加工  微细电极  微槽
收稿时间:2008-06-11

Processing Approach of Deep Micro Slit by Micro EDM
CUI Jing, LI Yong, XIONG Ying. Processing Approach of Deep Micro Slit by Micro EDM[J]. Journal of Beijing University of Technology, 2010, 36(3): 289-293.
Authors:CUI Jing  LI Yong  XIONG Ying
Affiliation:1.College of Mechanical Engineering and Applied Electronic Technology;Beijing University of Technology;Beijing 100124;China;2.Dept.of Precision Instruments & Mechanology Tsinghua University Beijing 100084;China
Abstract:In order to manufacture deep microslit,a new micro EDM process was developed.With this method a raw rod electrode with negative polarity is used to scan a metal plate to form a through slit.Then the rod electrode is moved perpendicularly to the slit,with certain distance from the center of the slit.Micro flat electrode is obtained after the raw rod electrode is fed into the plate in the axial direction of the rod.Micro slips are achieved by scan machining with the micro flat electrode finally.At last deep m...
Keywords:electrical discharge machining(EDM)  micromachining  microelectrodes  micro-slit
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