| 用于表面微观形貌测量的光学方法 |
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| 引用本文： | 冯斌,王建华.用于表面微观形貌测量的光学方法[J].工具技术,2005,39(11):71-76. |
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| 作者姓名： | 冯斌 王建华 |
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| 作者单位： | 西安工业学院;西安工业学院 |
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| 摘 要： | 介绍了在表面微观形貌测量中常用的光学测量方法,分析了它们各自的原理和优缺点,并对光学法表面微观形貌测量技术的发展作了简要评述。
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| 关 键 词： | 表面微观形貌 光学方法 测量 |
| 收稿时间： | 2005-03 |
| 修稿时间： | 2005-03 |
Optical Means used in Measuring Surface Microtopography |
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| Feng Bin,Wang Jianhua.Optical Means used in Measuring Surface Microtopography[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2005,39(11):71-76. |
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| Authors: | Feng Bin Wang Jianhua |
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| Affiliation: | Feng Bin Wang Jianhua |
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| Abstract: | The optical means used in measuring surface topography are introduced. The principle, property, good quality and shortcoming of these optical methods are analyzed and the development direction of optical means used in surface topography measurement is commented. |
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| Keywords: | surface microtopography optical means measuring |
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