| 用于微机电系统的SiO2/Si3N4驻极体的制备及电荷稳定性 |
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| 引用本文： | 肖慧明,温中泉,张锦文,陈钢进. 用于微机电系统的SiO2/Si3N4驻极体的制备及电荷稳定性[J]. 功能材料, 2007, 38(8): 1297-1299,1303 |
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| 作者姓名： | 肖慧明 温中泉 张锦文 陈钢进 |
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| 作者单位： | 浙江科技学院,功能材料研究所,浙江,杭州,310012;重庆大学,微系统研究中心,重庆,400044;北京大学,微电子学研究院,北京,100871 |
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| 基金项目： | 国家高技术研究发展计划(863计划) , 国家自然科学基金 , 同济大学波与材料微结构重点实验室基金 |
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| 摘 要： | 驻极体微型发电机是近期提出的微电子机械系统开发中的一个新领域,驻极体电荷稳定性则是影响驻极体微型发电机性能的关键.用等离子体增强化学气相沉积(PECVD)方法制备SiO2/ Si3N4双层膜,采用电晕充电和热极化方法对材料进行注极形成驻极体,探讨了器件加工工艺及存储环境对双层膜驻极体电荷稳定性的影响.结果表明,电晕充电后SiO2/ Si3N4双层膜的电荷存储稳定性明显优于SiO2单层膜;传统的电晕注极方法仅适用于大面积驻极体的制备,但对微米量级的材料表面不适用;微器件制备的工艺流程对驻极体电荷稳定性有显著影响,但存储环境对热极化驻极体电荷稳定性的影响很小.
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| 关 键 词： | 驻极体 微型发电机 SiO2/Si3N4双层膜 电荷稳定性 微器件加工 |
| 文章编号： | 1001-9731（2007）08-1297-03 |
| 修稿时间： | 2007-02-142007-04-29 |
Preparation and charge stability of SiO2/Si3N4 double layer electret used in micro electro mechanical system |
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| XIAO Hui-ming,WEN Zhong-quan,ZHANG Jing-wen,CHEN Gang-jin. Preparation and charge stability of SiO2/Si3N4 double layer electret used in micro electro mechanical system[J]. Journal of Functional Materials, 2007, 38(8): 1297-1299,1303 |
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| Authors: | XIAO Hui-ming WEN Zhong-quan ZHANG Jing-wen CHEN Gang-jin |
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| Affiliation: | 1.Institute of Functional Materials Research,Zhejiang University of Science and Technology,Hangzhou 310012,China;2.Microsystem Research Centre,Chongqing University,Chongqing 400044,China;3.Institute of Microelectronics,Peking University,Beijing 100871,China |
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| Abstract: | Electret micro-generator is a new research field in micro electro mechanical system.The charge stability of electret is the key to its working capability.In this paper the Si3N4/SiO2 double layer film and SiO2 single layer film were prepared by means of plasma enhanced chemical vapor deposition(PECVD) and charged with corona and thermal charging.The effects of manufacturing processes for micro-machining manufacture on electret charge stability were investigated with surface potential decay measurement.The results show that corona charged Si3N4/ SiO2 double layer film has higher charge stability than SiO2 single layer film.Corona charging method is not available for the charging of micron measurement films.The effect of storage environment on the thermal charging electret stability is minor. |
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| Keywords: | electret micro-generator SiO2/Si3N4 double layer film charge stability micro-machining manufacture |
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