高分辨X射线衍射法研究碳化硅单晶片中的多型结构

我们采用高分辨X射线衍射法对SiC单晶片中的多型结构进行了研究,研究发现在以4H-SiC为籽晶的晶体生长过程中,4H-SiC、6H-SiC、15R-SiC出现两相共存或三相共存现象.在单相、两相或三相共存区,X射线摇摆曲线具有明显不同的特征.根据多型结构,可以对摇摆曲线中的衍射峰进行鉴定.

Investigation on the Polytype Structure of SiC Crystal Slice by High Resolution X-ray Diffractometry

The polytype structure of SiC single crystal slice was investigated by high resolution X-ray diffractometry. We discovered that there are two or three phase existence of 4H-SiC,6H-SiC,15R-SiC in the process of the growth of 4H- SiC seed at a definite condition. At different regions the rocking curves have remarkably different features. Base on the polytype structures of SiC, the diffraction peaks can be identified in the rocking curves.