| ZnO及掺杂ZnO薄膜的研究进展 |
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| 引用本文： | 赵跃智,张俊,丁世敬.ZnO及掺杂ZnO薄膜的研究进展[J].化工科技,2008,16(2):60-64. |
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| 作者姓名： | 赵跃智 张俊 丁世敬 |
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| 作者单位： | 1. 洛阳理工学院,材料系,河南,洛阳,471023
2. 中国人民解放军61489部队,河南,洛阳,471023 |
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| 摘 要： | ZnO薄膜是一种Ⅱ~Ⅵ族的宽禁带半导体材料,具有优异的物理化学性能。通过对薄膜的掺杂,可以改善其性能或赋予其新的性能,使其应用更加广泛。作者综述了ZnO薄膜的制备方法,比较了各种制备方法的优缺点,重点探讨了ZnO及其掺杂薄膜在压电、光电、气敏及磁性能方面的研究,并对今后的研究方向进行了展望。
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| 关 键 词： | 掺杂ZnO薄膜 制备工艺 性能 |
| 文章编号： | 1008-0511(2008)02-0060-05 |
| 修稿时间： | 2007年12月19 |
Research advances on doped ZnO thin films |
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| ZHAO Yue-zhi,ZHANG Jun,DING Shi-jing.Research advances on doped ZnO thin films[J].Science & Technology In Chemical Industry,2008,16(2):60-64. |
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| Authors: | ZHAO Yue-zhi ZHANG Jun DING Shi-jing |
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| Abstract: | ZnO thin films are a kind of II~VI semiconductors with a wide direct band gap and excellent physical and chemical properties.Doped thin films can improve their functions or give them the new functions and make their applications more extensive.In this paper,preparation technique of ZnO thin films was reviewed and their advantages and disadvantages were pointed out.And the piezoelectric,optical,electrical,gas-sensing and ferromagnetic properties of ZnO and doped ZnO thin films were studied in detail.The applications of ZnO thin films were summarized,and an outlook to the research direction of aftertime was carried on. |
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| Keywords: | Doped ZnO thin films Preparation technique Properties |
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