压阻式压力传感器温度补偿技术的研究及应用

压阻式压力传感器易受温度影响产生零点漂移和灵敏度漂移,为了降低环境温度对传感器输出的影响,首先分析了传感器产生温度漂移误差的原因,针对传感器存在的温度漂移误差和输出信号的非线性介绍了一种硬件温度补偿方法和基于MAX1452的软件温度补偿方法,着重阐述了MAX1452的补偿原理以及对传感器的补偿过程.最后通过温度试验和温度循环试验比较分析了以上两种温度补偿方法,试验结果表明软件补偿方法具有更加优良的补偿效果,在-40～60℃温度范围内的精度小于0.5％.

Research on method of temperature compensation for piezoresistive pressure sensor

Piezoresistive pressure sensor is easily affected by temperature to make zero drift and sensitivity drift.To reduce the influence coming from temperature,the reasons of the temperature drift error was analyzed at first.Then a hardware temperature compensation method and a software temperature compensation method based on MAX1452 were introduced for the temperature errors and the no-liner of the sensor.The principles of the temperature compensation based on MAX1452 and executive processes were emphatically described.Finally,these two temperature compensation methods were compared and analyzed through temperature test and temperature cycling test,the results show that the software temperature compensation method was a more excellent method,the measurement accuracy in the range of-40～60 ℃ is smaller than 0.5％.