无酸水热法制备多孔硅

报道一种在无酸性腐蚀液的条件下用反应釜制备多孔硅的新方法。实验采用扫描电镜、拉曼光谱和光致发光谱对样品表面形貌、结构及发光性能进行表征，并与用常规电化学阳极氧化法制出的多孔硅进行了对比研究,研究结果表明用无酸水热法制出的多孔硅表面平整，孔的形状规则,发光效能提高更多。

Preparation of Porous Silicon by Non-Acid Hydrot hermal Method

This article has reported a new method to prepare porous silicon by using raction kettle without corrosive acid. SEM, Raman and PL spectrum were adopted to characterize the surface , structure and photoluminescence property of samples. In comparison with those prepared by anodising p type silicon, the porous silicons prepared by non-acid hydrothermal method have smooth surface , regular shape of pores , and higher PL efficiencey.