差动电容式传感器的高精度测量技术研究

针对差动电容式传感器的电容值变化过于微弱难于实现直接测量的特点,引入了电容比测量方法间接地实现了对电容值变化规律的测量。通过智能差动电容式测量模块的研制,把多种实用化技术手段应用到测量电路设计中,确保测值结果的高精度和高可靠性。测量模块的实际测量效果经相关实验得到了有效的验证。

Study on the high performance measurement technology of the differential capacitance sensors

A indirect measuring method is introduced to realize the capacitance variation measurement by detecting the capacitance ratio in this paper, which can over the difficulties of differential capacitance sensors due to the weakness outputs. On the basis of application of practical technologies, an intelligent measuring module for differential capacitance sensors is researched to insure high accuracy and stability of capacitance measurement. Some good results of the module have been reached after the relevant experiments and practical application.