| 光学式非接触厚度-微位移测量仪的研制 |
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| 引用本文： | 陈阳,王慕坤. 光学式非接触厚度-微位移测量仪的研制[J]. 哈尔滨理工大学学报, 2003, 8(3): 86-89 |
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| 作者姓名： | 陈阳 王慕坤 |
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| 作者单位： | 哈尔滨理工大学,测控技术与通信工程学院,黑龙江,哈尔滨,150080 |
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| 摘 要： | 在激光三角测量法原理基础上，应用光学系统成像技术，利用光电位置传感器PSD获得象点移动量，并根据象点移动量建立与被测物厚度-微位移变化之间的数学模型，通过象点位置变化的计算，研制了光学式非接触厚度-微位移测量仪．实现了被测物厚度-微位移变化量的测量．该测量仅的量程为1000μm，分辨力小于0．2μm．
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| 关 键 词： | 厚度－微位移测量仪 激光三角测量法 光电位置传感器 数学模型 斜射法 直射法 光学系统成像技术 |
| 文章编号： | 1007-2683(2003)03-0086-04 |
| 修稿时间： | 2003-01-14 |
Research of Optical Noncontact Thickness-displacement Meter |
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| CHEN Yang,WANG Mu-kun. Research of Optical Noncontact Thickness-displacement Meter[J]. Journal of Harbin University of Science and Technology, 2003, 8(3): 86-89 |
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| Authors: | CHEN Yang WANG Mu-kun |
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| Abstract: | Based on the triangular measuring principle of laser and applying the technology of light-image system with PSD (Position sensitive Detector) sensor, a mathematical model can be founded because of the relationship between the offset of light-point on PSD and the change of object thickness. According to this, the shift of object thickness can be measured through this analyses of displacement of light -point's position on PSD, and the reliability of this device can be tested with many practical specimens. The resolution of this meter is 0.2um and the range of measurement is 1 000 um. |
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| Keywords: | thickness-displacement triangular measuring principle PSD sensor |
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