| PSTM 用于Al_2O_3光波导薄膜的研究 |
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| 引用本文： | 潘石,王继松,吴世法,简国树.PSTM 用于Al_2O_3光波导薄膜的研究[J].光电子．激光,2001(4). |
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| 作者姓名： | 潘石 王继松 吴世法 简国树 |
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| 作者单位： | 大连理工大学物理系!大连116023 |
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| 基金项目： | 国家自然科学基金!资助项目 (3 9670 2 0 8) |
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| 摘 要： | 利用光子扫描隧道显微镜 (PSTM)检测研究 Al2 O3光波导薄膜及其制备工艺。分析了不同温度条件下采用离子束增强沉积工艺制备的 Al2 O3光波导薄膜 PSTM图像。结果表明 :适当的增加基片的温度可以减小散射损耗 ,改善 Al2 O3光波导薄膜的性能
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| 关 键 词： | 光子扫描隧道显微镜(PSTM) Al2O3光波导薄膜 散射损耗 |
Study on Al_2O_3 Wave-guide Film with PSTM |
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| PAN Shi,WANG Ji song,WU Shi f,JIAN Guo shu.Study on Al_2O_3 Wave-guide Film with PSTM[J].Journal of Optoelectronics·laser,2001(4). |
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| Authors: | PAN Shi WANG Ji song WU Shi f JIAN Guo shu |
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| Abstract: | A method for measuring Al 2O 3 optical wave guide film and studying its fabrication technique was proposed.The photon scanning tunneling microscope (PSTM) images of Al 2O 3 optical wave guide film made by ion beam enhanced deposition (IBED) technique at different temperature were analyzed.The results show that by properly increasing the temperature of the substrate,the scattering loss was decreased and the property of optical Al 2O 3 wave guide was improved. |
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| Keywords: | photon scaning tunneling microscope (PSTM) Al 2O 3 optical wave guide film scattering loss |
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