一体化微操作器误差分析与建模

为评价各种误差对微操作器精度的影响，以一体化超精密微操作器为研究对象，分析了加工误差、机构原理误差、测量误差、环境带来的误差以及驱动误差等造成微操作器精度降低的因素，建立了加工误差的偏微分方程解析模型，并用有限元仿真验证了加工误差模型的准确性。在详细分析误差源的基础上，提出了提高微操作器精度的措施。

Error Analysis and Modeling of Monolithic Micromanipulator

In order to evaluate the effects of various errors on micromanipulator accuracy, the fabricating error, mechanism principal error, measurement error, environment error and actuator error were analyzed and a partial differentiation error model of manufacturing error was developed. The flexure hinges hole radius error, cross-sectional width error and minimum thickness error were simulated by the model, respectively. Besides, we simulated the operating process to validate the analytical error model by using the finite element method. The analytical and simulated results show that the analytical error model is correct and the minimum thickness error induces biggest stiffness error. Based on the error analysis, some methods were suggested to enhance the precision of monolithic micromanipulator. The obtained error model and data were used to establish a theoretical limit for the design and precision control of micromanipulator.