高精度单频激光干涉仪的设计与试验研究

提出了一种光学8倍频的耦合差动式干涉光路，其结构设计简洁紧凑，光路布局对称性好，光程差倍增，符合阿贝原则和结构变形最小原则。对系统精度在理论分析的基础上进行了估算，得出了在10mm范围内干涉仪综合精度的理论值约为±1．8nm。采用与电容测微仪比对的方法对该系统进行检测，利用线性回归的方法对测量结果进行处理。试验结果表明：该干涉测量系统的精度约为14nm。

Design and experiment study of single frequency laser interferometry with high precision

A new laser interferometric system with nanometric accuracy is developed. Optical system with 8 times optical path difference is designed. The following materials and methods are utilized：simple, stable and compact optical layout;coupled defferential interferometry;symmetrical optical paths;multiplication optical path difference; Abbe principle. The accuracy of the system is analyzed and the result is about ± 1.8 nm within the range of 10 mm. The test is given by comparing with the capacitive micrometer. Experiment results show that the measuring accuracy is about 14 nm.