不锈钢金属双极板TiW和TiTa膜的制备及性能

针对质子交换膜燃料电池金属双极板耐蚀性和导电性有待提高的问题，本文用磁控溅射双靶共溅的方法，在316L不锈钢基体表面沉积TiW和TiTa两种非贵金属膜层。通过X射线衍射、扫描电子显微镜-能谱仪、X射线光电子能谱仪、电化学和接触电阻测试等方法，表征了涂覆膜层后不锈钢的微观结构、表面形貌、化学组成、耐腐蚀性和导电性。实验结果表明，磁控溅射制备得到的TiTa膜表面较为均匀，且TiTa膜沉积的不锈钢具有较好的耐腐蚀性，其恒电位极化电流密度能够维持在0.3μA/cm²；从导电性来看，TiW膜与碳纸之间的接触电阻小于TiTa膜。综合考虑材料的各项性能，认为沉积TiTa膜的316L不锈钢有用作金属双极板材料的潜力。

Preparation and properties of metallic bipolar plate with TiW and TiTa films

The TiW and TiTa films were deposited on 316L stainless steel (316L SS) by magnetron co-sputtering method in order to improve the performance of the metallic bipolar plate of proton exchange membrane fuel cell (PEMFC). X-ray diffraction (XRD), scanning electron microscopy (SEM), energy disperse spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS), electrochemical methods and interfacial contact resistance (ICR) measurements were used to characterize the 316L SS with TiW and TiTa films. The results show that the deposited TiTa film was relatively uniform. Compared with TiW, TiTa film gave better corrosion resistance. In the potentiostatic polarization test, the corrosion reaction current density of TiTa film maintained about 0.3μA/cm². As for conductivity, the ICR between TiW film and carbon paper was lower than that with TiTa film. Overall, the 316L SS with TiTa film is a kind of promising bipolar plate material for PEMFC.