| 纳米锥SiGe-SOI光波导与光纤的耦合分析 |
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| 引用本文： | 冯松,高勇. 纳米锥SiGe-SOI光波导与光纤的耦合分析[J]. 半导体学报, 2014, 35(7): 074010-6 |
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| 作者姓名： | 冯松 高勇 |
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| 作者单位： | [1]Department of Electronic Engineering, Xi＇an University of Technology, Xi＇an 710048, China [2]School of Science, Xi＇an Polytechnic University, Xi＇an 710048, China |
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| 基金项目： | 国家自然科学基金;市自然科学基金;其它 |
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| 摘 要： | Based on a submicrometer-sized SiGe-SOI waveguide, the coupling loss mechanism is analyzed between the submicrometer-sized SiGe-SOI waveguide and the fiber. The main sources of coupling loss are analyzed, and the mismatch loss of the mode field is the mainly lost during connection between the submicrometer-sized waveguide and the fiber. In order to reduce the mismatch loss of the mode field, the structure ofa nanotaper SiGeSOI waveguide with a nanometer-sized tip is adopted. By reducing the waveguide dimensions to increase the mode field size, coupling loss could be reduced between the waveguide and the fiber. Different mode field dimensions ofnanotaper SiGe-SOI waveguides and fiber are quantitatively analyzed, and the quantitative relationship between nanotaper SiGe-SOI waveguide dimensions and mode field dimensions are obtained. Finally, nanotaper SiGe-SOI waveguides are made, and the test and analysis have been done. The final experimental results accord well with the theoretical analysis. When the waveguide width is 0.5 μm, the minimum coupling loss of the SiGe-SOI waveguide is 0.56 dB/facet, and also the correctness of the design method and theoretical analysis are verified.
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| 关 键 词： | 纳米尺寸 耦合损失 波导 光纤 最小耦合损耗 损耗机制 亚微米 定量分析 |
| 收稿时间： | 2014-01-06 |
| 修稿时间： | 2014-04-09 |
Analysis of coupling between nanotaper SiGe-SOI waveguide and fiber |
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| Feng Song and Gao Yong. Analysis of coupling between nanotaper SiGe-SOI waveguide and fiber[J]. Chinese Journal of Semiconductors, 2014, 35(7): 074010-6 |
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| Authors: | Feng Song and Gao Yong |
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| Affiliation: | Department of Electronic Engineering, Xi'an University of Technology, Xi'an 710048, China;School of Science, Xi'an Polytechnic University, Xi'an 710048, China;Department of Electronic Engineering, Xi'an University of Technology, Xi'an 710048, China;School of Science, Xi'an Polytechnic University, Xi'an 710048, China |
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| Abstract: | optical devices nanotaper SiGe-SOI waveguide mode field coupling loss |
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| Keywords: | optical devices nanotaper SiGe-SOI waveguide mode field coupling loss |
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