薄膜涂覆的研究进展

由于薄膜流过的基面不是平面,涂覆机械在工作时的振动和旋转使薄膜产生不均匀性．因此对于薄膜的非均匀性行为需要进行深入的力学研究．本文对薄膜涂覆工艺及分类进行了介绍,从力学角度阐述了影响薄膜厚度、均匀程度及涂覆速度的诸多因素,如薄膜流动、边界层、动态湿周、动态接触角、接触线等．并展望了薄膜涂覆的发展现状．

The Brief Introduction for Coating

Because that the substrates are always not planed. And the librations and rotations of the coating machines, the films are always uneven. It is very necessary to do more researches on the films' ununiformity. This article gave a briefintroduction to the coating process and the classifications. We explain the factors that influence the thickness and uniformity of the films and the coating speed that include the flow of the film, boundary layers, dynamic wetting line, dynamic contact angle and line. At the end of the article, we present the prospects of coating.