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AIN陶瓷烧结技术研究进展
引用本文:李友芬 刘伟伟 张麟宁. AIN陶瓷烧结技术研究进展[J]. 现代技术陶瓷, 2006, 27(1): 28-31
作者姓名:李友芬 刘伟伟 张麟宁
作者单位:北京化工大学可控化学反应科学与技术基础教育部重点实验室,北京100029
摘    要:氮化铝(AIN)因其具有高热导率,作为基片材料在电子元器件中得到日益重视。本文主要论述了氮化铝陶瓷制备过程中各种烧结参数,包括烧结助剂、烧结气氛、保温时间、常压烧结、热压烧结、微波烧结和等离子烧结等对氮化铝陶瓷性能的影响。并指出可通过合适的AIN粉体制备技术,结合快速烧结方法可得到具有晶粒细小、结构均匀、高致密度和高导热率的AIN陶瓷。

关 键 词:氮化铝 烧结 热导率

Research Progress in Sintering Technology for AIN Ceramics
Li You fen ,Liu Weiwei, Zhang Linning. Research Progress in Sintering Technology for AIN Ceramics[J]. Advanced Ceramics, 2006, 27(1): 28-31
Authors:Li You fen   Liu Weiwei   Zhang Linning
Affiliation:The Key Laboratory of Science and Technology of Controllable Chemical Reactions, Ministry of Education, Beijing University of Chemical Technology, Beijing 100029
Abstract:As a new kind of ceramic material for substrate application, aluminum nitride (AlN) has attracted more and more attentions for the people because of its high thermal- conductivity. This paper mainly related to the effects of some parameters on the properties of AlN in the period of preparation, including additives, sintering atmosphere, soaking time and sintering processes,such as pressureless sintering, hot- pressure sintering, microwave sintering and SPS. It also pointed out that AlN can be obtained with small grain, uniform structure, high relative density and high thermal- conductivity through preparing AlN powder by a proper way firstly and then by fast sintering method.
Keywords:aluminum nitride   sintering   thermal conductivity
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