| TiO2薄膜制备及其气敏特性 |
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| 引用本文： | 许明,孙以材,潘国峰,张翼飞,何建建.TiO2薄膜制备及其气敏特性[J].传感器世界,2009,15(2):15-19. |
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| 作者姓名： | 许明 孙以材 潘国峰 张翼飞 何建建 |
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| 作者单位： | 1. 河北工业大学微电子所,300130
2. 河北工业大学,天津,300130 |
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| 摘 要： | NO2是一种强毒性气体，本文利用了溶胶一凝胶法在硅片及陶瓷管上制备TiO2纳米薄膜，并探讨了在制备过程中不同的因素对薄膜成膜质量的影响。并用马弗炉对硅片及陶瓷管上制备的TiO2纳米薄膜进行不同温度的退火处理。对其分别进行XRD的分析，和原子力显微镜分析。利用气敏测试系统对不同的退火温度下的气敏元件进行测试。研制出工作温度低，气敏特性强，响应恢复特性好的基于TiO2的NO2气敏传感器。
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| 关 键 词： | TiO2薄膜 NO2气体 溶胶-凝胶法 气敏元件 |
Preparation of TiO_2 thin films and their gas-sensitive properties |
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| XU Ming,SUN Yi-cai,PAN Guo-feng,ZhANG Yi-fei,HE Jian-jian.Preparation of TiO_2 thin films and their gas-sensitive properties[J].Sensor World,2009,15(2):15-19. |
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| Authors: | XU Ming SUN Yi-cai PAN Guo-feng ZhANG Yi-fei HE Jian-jian |
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| Affiliation: | Hebei University of Technology;Tianjin 300130;China |
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| Abstract: | NO2 was a strong toxic gas. TiO2 nanometer thin films are prepared on the Si chip and the ceramic pipe by sol - gel method for detecting NO2 in this paper. The influences of different factors to the membrane qualities of thin films in the preparation processes are discussed. And annealing treatments to the TiO2 nanometer thin films are completed by the muffle furnaces in different temperature conditions. The XRD and AFM analysis are done separately to them. The performances of gas sensor with different thin... |
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| Keywords: | TiO2 thin films NO2 gas Sol-gel gas sensor |
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