| Affiliation: | 1. Fraunhofer Institute for Ceramic Technologies and Systems, Dresden, Germany;2. Dresden Center for Nanoanalysis, Technische Universit?t Dresden, Dresden, Germany;3. Fraunhofer Institute for Ceramic Technologies and Systems, D‐01109 Dresden, Germany;4. GLOBALFOUNDRIES, Fab 8, New York, USA;5. GLOBALFOUNDRIES Dresden Module One LLC& Co. KG, D‐01109 Dresden, Germany;6. Dresden Center for Nanoanalysis, Technische Universit?t Dresden, D‐01187 Dresden, Germany;7. Helmholtz Zentrum Berlin, D‐12489 Berlin, Germany |
