| 适用于微传感器的纳米多孔铝膜的制备研究 |
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| 引用本文： | 郑丹,徐爱国,董瑾,郭强. 适用于微传感器的纳米多孔铝膜的制备研究[J]. 上海轻工业高等专科学校学报, 2010, 0(4): 251-254 |
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| 作者姓名： | 郑丹 徐爱国 董瑾 郭强 |
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| 作者单位： | 上海应用技术学院化学与环境工程学院,上海200235 |
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| 基金项目： | 上海应用技术学院基金资助项目（KJ2009-08） |
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| 摘 要： | 在单晶硅表面溅射铝,采用两步阳极氧化法制备纳米多孔铝膜。研究了电解液种类、阳极氧化时间、扩孔时间对孔的结构与形貌的影响。结果表明,与硫酸和磷酸相比,草酸是制备纳米孔阵列的相对方便与可靠的电解液;第二步阳极氧化时间对孔的均匀性及孔深度影响较大,对平均孔径的影响较小;扩孔时间的长短对孔径大小及孔的均匀性均影响显著。
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| 关 键 词： | 纳米氧化多孔铝膜 阳极氧化 平均孔径 孔均匀性 |
Study on the Preparation of Nanoporous Anodic Alumina Membrane for Microsensor |
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| ZHENG Dan,XU Ai-guo,DONG Jin,GUO Qiang. Study on the Preparation of Nanoporous Anodic Alumina Membrane for Microsensor[J]. Journal of Shanghai Institute of Technology(Natural Science), 2010, 0(4): 251-254 |
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| Authors: | ZHENG Dan XU Ai-guo DONG Jin GUO Qiang |
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| Affiliation: | (School of Chemical and Environmental Engineering,Shanghai Institute of Technology,Shanghai 200235,China) |
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| Abstract: | By sputtering alumina on the surface of silicon which was anodic alumina oxide（AAO） films were prepared by two-step anodic oxidation technology.The effect of electrolyte,anodic oxidation time and expanding time on the pore structure were studied.The results indicate that（1） compared with sulfuric and phosphoric acid,the oxalic acid is a convenient and dependable electrolyte for preparing nanoporous anodic alumina;（2）The second anodic oxidation time has a bigger influence on the uniformity and depth of the pores,and a smaller influence on the pore diameter.（3） The effect of expanding time on average pore size and uniformity is notable. |
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| Keywords: | nanoporous anodic alumina membrane anodic oxidation average pore size pore uniformity |
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