六自由度奈米测量机之量测系统组装及校正

介绍一个六自由度奈米级精度测量机台(行程为25mm×25mm)之量测系统的组装及系统的校正,此六自由度奈米测量机分为两部份,第一部分为利用五根压电致动器所组成的四自由度(Z、θx、θy、θz)补偿平台,用以补偿组装及加工误差.第二部份为利用V型导轨架构成之XY双轴滑轨平台,配合音圈马达之推动,使平台能达到XY轴向之定位...

Construction and Calibration of Measurement Systems of Precision Long-range Scanning Stage

In this paper, the construction and calibration of the measurement systems of a six-degrees-of-freedom （6DOF） long-range （25mm×25mm） scanning nano-stage is introduced. The first stage is integrated by a four-axes piezo-stage （with 5 piezoelectric actuators） and a two-axis ball guided long-range shaft motor driven stage. And the ball guided stage utilizes two shaft motor to provide the movement along X and Y axis throughout its scanning range. While the piezoelectric driven stage is designed to compensate the vertical straightness, pitch, roll and yow errors throughout the whole scanning range of the second stage. In this paper, the construction process of this 6DOF measurement system is introduced and the results of calibration are proposed.