| 超光滑光学基底表面原子力显微镜测试方法 |
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| 引用本文： | 靳京城,金春水,邓文渊,喻波.超光滑光学基底表面原子力显微镜测试方法[J].中国激光,2011(11). |
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| 作者姓名： | 靳京城 金春水 邓文渊 喻波 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室;中国科学院研究生院; |
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| 基金项目： | 国家重大科技专项资助课题 |
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| 摘 要： | 原子力显微镜(AFM)是评价亚纳米级表面粗糙度σRMS最主要的测试仪器,但其测试结果会因采样条件(采样间距、采样点数)及测量点位置变化而改变。以AFM测试超光滑光学基底随机表面为例,应用累积功率谱理论建立了确定合理采样条件的方法,避免了采样条件选取不当带来的数据丢失或冗余;通过全局优化选取测量点和局部优化选取测量点相结合,降低了样品表面区域性差异给测试结果带来的不确定性,并大大减少了获得可靠测试结果所需的测试量。上述工作为超光滑光学基底AFM测试提供了有效方案。
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| 关 键 词： | 测量 原子力显微镜 超光滑基底 均方根粗糙度 采样条件 选点方案 |
Testing Method for Optical Supersmooth Substrate Surface by Atomic Force Microscopy |
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| Jin Jingcheng, Jin Chunshui Deng Wenyuan Yu Bo State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics , Physics,Chinese Academy of Sciences,Changchun,Jilin ,China Graduate University of Chinese Academy of Sciences,Beijing ,China.Testing Method for Optical Supersmooth Substrate Surface by Atomic Force Microscopy[J].Chinese Journal of Lasers,2011(11). |
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| Authors: | Jin Jingcheng Jin Chunshui Deng Wenyuan Yu Bo State Key Laboratory of Applied Optics Changchun Institute of Optics Fine Mechanics Physics Chinese Academy of Sciences Changchun Jilin China Graduate University of Chinese Academy of Sciences Beijing China |
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| Affiliation: | Jin Jingcheng1,2 Jin Chunshui1 Deng Wenyuan1 Yu Bo1 1State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun,Jilin 130033,China 2Graduate University of Chinese Academy of Sciences,Beijing 100049,China |
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| Abstract: | Atomic force microscopy(AFM) is the main technique for measuring surfaces of sub-nanometer root-mean-square roughness,but its results always vary with the sampling conditions(sampling interval and sampling points) and measuring position.As a practical example of a supersmooth substrate random surface,an effective method based on accumulated power spectral analysis is proposed and evaluated for appropriate sampling term selecting.It is shown that this method can avoid the loss or redundancy of roughness info... |
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| Keywords: | measurement atomic force microscopy supersmooth substrate root-mean-square roughness sampling conditions measuring position selection strategy |
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