| 薄膜应变计的横向效应及其影响因素 |
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| 引用本文： | 刘昆 张育林. 薄膜应变计的横向效应及其影响因素[J]. 传感器与微系统, 1996, 0(2): 8-11 |
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| 作者姓名： | 刘昆 张育林 |
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| 作者单位： | 国防科技大学 |
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| 摘 要： | 从电阻公式出发，利用金属的应变－电阻效应理论、弹性力学理论和薄膜的电导理论，导出了薄膜应变计的横向效应的表达式．分析了薄膜的厚度对薄膜应变计的横向效应的影响，并给出了实验结果与理论分析结果的对比．
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| 关 键 词： | 薄膜应变计，灵敏系数，横向效应 |
The Crosswise Effects of Thin-Film Strain Gages and Its Influencing Factors |
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| Liu Kun, Zhang Yulin, Wang Hongye. The Crosswise Effects of Thin-Film Strain Gages and Its Influencing Factors[J]. Transducer and Microsystem Technology, 1996, 0(2): 8-11 |
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| Authors: | Liu Kun Zhang Yulin Wang Hongye |
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| Affiliation: | Uaiversity of National Defense Technology |
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| Abstract: | By using the theory of metal strain-resistance effects, elastic mechanics and the theory of thin films conduction, the formula of the crosswise effects is deduced from the formula of metal resistance in this paper. Then it analyses the effectS of the thickness of thin-film strain gages on its cross effects, and the comparison of theoretical resultS and experimental ones of crosswise effects of thin-film strain gages is given in the paper. |
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| Keywords: | Thin-film strain gages Crosswise effects Sensitivity |
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