| 氧化物异质外延薄膜生长的计算机模拟 |
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| 引用本文： | 谭浚哲,肖定全,张青磊,吴家刚,朱基亮,朱建国. 氧化物异质外延薄膜生长的计算机模拟[J]. 功能材料, 2008, 39(3): 430-432 |
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| 作者姓名： | 谭浚哲 肖定全 张青磊 吴家刚 朱基亮 朱建国 |
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| 作者单位： | 四川大学,材料科学与工程学院,四川,成都,610064 |
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| 基金项目： | 国家重点基础研究发展计划(973计划) , 国家自然科学基金 |
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| 摘 要： | 利用Monte Carlo方法分别模拟了在SrTiO3基底上沉积MgO薄膜和在MgO基底上沉积SrTiO3薄膜.模拟中,选取与实验中薄膜生长相近的参数条件,引入了新的参数扩散势垒,得到了在晶格正失配(张应力)和负失配(压应力)下薄膜生长的形貌图以及薄膜粗糙度的变化曲线图,分析了张应力和压应力对薄膜生长形貌的影响.模拟结果与文献报道的外延薄膜生长模式的实验观察结果一致.
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| 关 键 词： | Monte Carlo模拟 异质外延模拟 扩散势垒 薄膜生长 |
| 文章编号： | 1001-9731（2008）03-0430-03 |
| 收稿时间： | 2007-07-13 |
| 修稿时间： | 2007-10-08 |
Simulation of the hetero-eptiaxial growth of oxide thin films |
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| TAN Jun-zhe,XIAO Ding-quan,ZHANG Qing-lei,WU Jia-gang,ZHU Ji-liang,ZHU Jian-guo. Simulation of the hetero-eptiaxial growth of oxide thin films[J]. Journal of Functional Materials, 2008, 39(3): 430-432 |
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| Authors: | TAN Jun-zhe XIAO Ding-quan ZHANG Qing-lei WU Jia-gang ZHU Ji-liang ZHU Jian-guo |
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| Abstract: | The hetero-epitaxial growth of the MgO films deposited on the SrTiO3 substrates and the SrTiO3 films deposited on the MgO substrates is simulated by Monte Carlo method. Choosing proper parameter and diffusion bounds, the 3D morphology and surface roughness of thin films were simulated. The relationship of 3D morphology and compressive stress, tensile stress are also investigated. The simulation results are quite agreement with the experimental results published in the literature. |
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| Keywords: | Monte Carlo simulation hetero-epitaxial simulation diffusion bounds thin film growth |
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