| 刀体破损检测技术在划片机中的应用 |
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| 引用本文： | 孙彬,郎小虎,王宏智,王兵锋,樊兵,季峥. 刀体破损检测技术在划片机中的应用[J]. 电子工业专用设备, 2014, 0(5): 38-40 |
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| 作者姓名： | 孙彬 郎小虎 王宏智 王兵锋 樊兵 季峥 |
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| 作者单位： | 北京中电科电子装备有限公司,北京100176 |
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| 摘 要： | 介绍了应用于半导体全自动晶圆划切设备中的刀体破损检测方法,在理论分析与计算的基础上制定检测方案,通过大量数据分析与处理,设计出抗干扰性强的数字滤波器,降低了系统误报率,提高了设备稳定性,保证了划切质量。
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| 关 键 词： | 刀体破损检测 光纤传感器 实时检测 晶圆 |
Blade Breakage Detection Technology in the Dicing Saw Machine |
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| SUN Bin,LANG Xiaohu,WANG Hongzhi,WANG Bingfeng,FAN Bing,JI Zheng. Blade Breakage Detection Technology in the Dicing Saw Machine[J]. Equipment for Electronic Products Marufacturing, 2014, 0(5): 38-40 |
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| Authors: | SUN Bin LANG Xiaohu WANG Hongzhi WANG Bingfeng FAN Bing JI Zheng |
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| Affiliation: | (Beijing Electronics Equipment Company, Ltd, Beijing 100176, China) |
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| Abstract: | The real time blade breakage detector used in semiconductor automatic wafer dicing equipment is introduced. Based on theoretical analysis and calculation, detection scheme is developed. By a lot of data analysis and processing, a strong anti-jamming digital filter is designed. To reduce system false alarm rate and improve the stability of the equipment and ensure that dicing quality is good. |
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| Keywords: | Blade breakage detector Optical fiber sensor Real time inspection Wafer |
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