光束质量因子测量的不确定度分析

 介绍了激光光束质量因子的定义以及测量原理，分析了光束质量因子的数学模型中各个量的不确定度来源以及评定方法，并以实验数据为基础，对具体的实验数据进行了分析计算。提出了减小激光光束质量因子测量不确定度的途径，包括统一激光束直径的确认方法，保证测量条件的稳定以及提高光束质量测量系统的测量精度等。

Evaluation of uncertainty in beam quality measurement

The definition and measuring principle of laser beam quality foctor are introduced.The uncertainty sources of beam quality are analyzed. The standard uncertainty and combined standard uncertainty are calculated based on some experimental data.Specific methods are put forward for reducing standard uncertainty of beam quality measurement. The definition method of beam diameter must be uniformed.Invariant measurement condition and high accuracy of laser beam quality measurement system are important for reducing standard uncertainty of beam quality measurement.