| 用卢瑟福背散射/沟道技术研究ZnO/Zn0.9Mg0.1O/ZnO异质结的弹性应变 |
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| 引用本文： | 王 坤,姚淑德,侯利娜,丁志博,袁洪涛,杜小龙,薛其坤.用卢瑟福背散射/沟道技术研究ZnO/Zn0.9Mg0.1O/ZnO异质结的弹性应变[J].物理学报,2006,55(6):2892-2896. |
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| 作者姓名： | 王 坤 姚淑德 侯利娜 丁志博 袁洪涛 杜小龙 薛其坤 |
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| 作者单位： | (1)北京大学物理学院，北京 100871; (2)中国科学院物理研究所表面物理国家重点实验室，北京 100080 |
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| 基金项目： | 国家自然科学基金(批准号：10375004、60376004)和中国-比利时科技合作项目(批准号：BIL04/05)资助的课题. |
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| 摘 要： | 利用卢瑟福背散射/沟道技术对射频等离子体辅助分子束外延法生长在蓝宝石衬底上的ZnO/Zn0.9Mg0.1O/ZnO异质结进行了组分分析，并得到了异质结弹性应变随深度的变化，应变由界面向表面逐渐释放，并由负变正，且在ZnO与Zn0.9Mg0.1O界面处轻微增大.负的应变是由于ZnO与衬底的晶格失配和热失配，而逐渐变为正值是Zn0.9Mg0.1O与ZnO的晶格常数差异及弹性应变的
关键词：
异质结
卢瑟福背散射/沟道
弹性应变
ZnMgO
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| 关 键 词： | 异质结 卢瑟福背散射/沟道 弹性应变 ZnMgO |
| 文章编号： | 1000-3290/2006/55（06）/2892-05 |
| 收稿时间： | 8/7/2005 12:00:00 AM |
| 修稿时间： | 2005-08-072005-12-06 |
Depth-dependent elastic strain in ZnO/Zn0.9Mg0.1O/ZnO heterostructure studied by Rutherford backscattering/channeling |
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| Wang Kun,Yao Shu-De,Hou Li-N,Ding Zhi-Bo,Yuan Hong-Tao,Du Xiao-Long and Xue Qi-Kun.Depth-dependent elastic strain in ZnO/Zn0.9Mg0.1O/ZnO heterostructure studied by Rutherford backscattering/channeling[J].Acta Physica Sinica,2006,55(6):2892-2896. |
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| Authors: | Wang Kun Yao Shu-De Hou Li-N Ding Zhi-Bo Yuan Hong-Tao Du Xiao-Long and Xue Qi-Kun |
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| Abstract: | ZnO/Zn0.9Mg0.1O/ZnO heterostructure was grown by radio frequency plasma-assisted molecular beam epitaxy on a sapphire (0001) substrate. By using RBS/C, the depth-dependent elastic strain was deduced. The strain changes from negative to positive from interface to surface, and the value is higher at the depth close to the interface (also at the interface between ZnO and Zn0.9Mg0.1O) and decreases towards the surface. The negative tetragonal distortion was explained by considering the lattice mismatch and thermal mismatch between ZnO and sapphire substrate, and the positive distortion is due to the tensile strain in the parallel direction of Zn0.9Mg0.1O and the gradual release of the strain. |
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| Keywords: | heterostructure Rutherford backscattering/channeling elastic strain ZnMgO |
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