An improved fabrication method for carbon nanotube probe |
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Authors: | XU Zong-wei GUO Li-qiu DONG Shen ZHAO Qing-liang |
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Affiliation: | [1]Precision Engineering Research Institute, Harbin Institute of Technology, Harbin 150001, China; [2]State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China; [3]School of Mechanical Engineering, Tsinghua University, Beijing 100084, China |
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Abstract: | An improved arc discharge method is developed to fabricate the carbon nanotube probe.In this method,the silicon probe and the carbon nanotube were manipulated under an optical microscope.When the silicon probe and the carbon nanotube were very close,30-60 V dc or ac was applied between them,and the carbon nanotube was divided and attached to the end of the silicon probe.Comparing with the arc discharge method,the new method need not coat the silicon probe with metal in advance,which Can greatly reduce the fabrication difficulty and cost.The fabricated carbon nanotube probe exhibits the good property of hish aspect ratio and can reflect the true topography more accurately than the silicon probe. |
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Keywords: | carbon nanotube(CNT) atomic force microscope(AFM) probe fabrication |
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