时域三点法测量直线度信息高精度获取方法研究

常规时域三点法在直线度误差测量中会把零位和随机误差的影响迭代放大，使得直线度重构曲线失真，无法得到正确的直线度误差。通过对常规时域三点法数据处理误差放大机理进行研究，提出了基于比较消除法的误差等效均化的处理办法，并利用仿真和实验证实了其有效性和实用性。优化了时域三点法的直线度测量，使得直线度信息高精度获取成为可能。

Research on Accurate Information Acquisition of Straightness Errors with Time-domain Three-point Method

In the field of straightness measurement, the zero errors and random errors would increase quickly within a few iterations if conventional time-domain three-point method was used.As a result,the reconstruction of the straightness curve was distorted, thus the correct straightness error can not be obtained.A error-equivalent-averaging method based on comparing-then-elimination approach was proposed herein, and its effectiveness and practicality were also proved by simulations and experiments. Accordingly time-domain three-point method was optimized,thus it is possible to obtain  straightness information accurately.