基于三次样条插值的硅压阻式压力传感器的温度补偿

传感器的零点温度漂移、灵敏度温度漂移和非线性误差是影响传感器性能的主要因素，如何能使该类误差得到有效补偿对于提高其性能有重要意义。提出了基于三次样条曲线插值的温度补偿方法，改进了传统三次样条曲线插值的补偿方法，分别对传感器的零点、灵敏度以及非线性进行补偿，用这种方法对测压范围为1.0140×105 Pa～3.0140×105 Pa，温度范围为-20℃～+60℃的硅压阻式压力传感器的实验标定结果进行了温度补偿。通过比较传统三次样条插值补偿后的传感器输出信号，验证了使用改进后的三次样条曲线插值法的补偿效果更好。这种方法为高精度压力传感器的温度补偿提供了一种有价值的理论依据。

Temperature compensation of piezoresistive pressure sensor based on the interpolation of third order splines

The thermal zero drift,the thermal sensitivity drift and non-linear error of piezoresistive pressure sensor are the main factors of affecting the performance of sensors. So how to effectively compensate this kinds of errors to improve its performance is significative.The temperature compensation method based on the interpolation of third or?der splines was presented. The traditional compensation method based on the interpolation of third order splines was improved,to compensate zero drift,sensitivity drift and non-linear error respectively. This method was applied for the temperature compensation of the experimental results of piezoresistive pressure sensor. The mea suring range of the pressure sensor is 1.014 0 × 105 Pa~3.014 0 × 105 Pa and the applied temperature range is-20 ℃~+60℃. By comparing the output signals by the sensor based on the traditional interpolation of third order splines, the effect about improved compensation method based on the interpolation of third order splines was better.The pro?posed method can provide a valuable theoretical reference for the temperature compensation of the high precision pressure sensors.