| 利用AFM对单晶硅表面加工化学反应理论分析 |
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| 引用本文： | 袁福龙,朱宇君,闫永达,袁博,郭永峰,梁迎春.利用AFM对单晶硅表面加工化学反应理论分析[J].黑龙江水专学报,2010,1(4):51-57. |
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| 作者姓名： | 袁福龙 朱宇君 闫永达 袁博 郭永峰 梁迎春 |
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| 作者单位： | [1]黑龙江大学化学化工与材料学院,哈尔滨150080 [2]哈尔滨工业大学机电学院,哈尔滨150001 [3]华南理工大学机械与汽车工程学院,广州510640 |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 以原子力显微镜为工具,在空气条件下对单晶硅片表面加工得到下凹的三维微结构。给出了AFM金刚石针尖在对单晶硅的微加工中的化学反应和加工模型。对加工条件下发生的化学反应及其原理进行了理论分析。用化学热力学定律、化学动力学原理和相关的热力学数据自由能、生成热、化学键能、活化能等分析加工过程中发生的反应是空气中O2与单晶硅Si反应生成二氧化硅的过程;金刚石针尖磨损发生的反应主要是空气中O2与金刚石针尖C反应生成CO2的过程。
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| 关 键 词： | AFM 二氧化硅 化学热力学 化学动力学 |
Theoretical Analysis of Chemical Reaction for Machining the Facet of Single Crystal Silicon Using AFM |
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| YUAN Fu-long,ZHU Yu-jun,YAN Yong-da,YUAN Bo,GUO Yong-feng,LIANG Ying-chun.Theoretical Analysis of Chemical Reaction for Machining the Facet of Single Crystal Silicon Using AFM[J].Journal of Heilongjiang Hydraulic Engineering College,2010,1(4):51-57. |
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| Authors: | YUAN Fu-long ZHU Yu-jun YAN Yong-da YUAN Bo GUO Yong-feng LIANG Ying-chun |
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| Affiliation: | 1.School of Chemistry and Material Science,Heilongjiang University,Harbin 150080,China;2.School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150001,China;3.School of Mechanic ＆ Automotive Engineering,South China University of Technology,Guangzhou 510640,China) |
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| Abstract: | A 3D micro-concave formation is machined out on the surface of single crystal silicon（100） using an AFM diamond tip in an ambient atmosphere.The machining model and chemical reaction of the processing on single crystal silicon wafer by AFM is given.The article focuses on the analysis of chemical reaction and its principle under the machining condition.The oxidation of silicon by O2 in the air is the major reaction in a machining process according to chemical thermodynamics and chemical kinetics.The abrasion of AFM diamond tip is caused by the reaction between oxygen in the air and carbon element from the diamond tip,during which carbon dioxide is produced. |
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| Keywords: | atomic force microscope（AFM） silicon dioxide thermodynamics kinetics |
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