集成式五维微力/力矩传感器的研究

五维微力 /力矩传感器应用于微装配机器人操作末端的微力觉感知 ,能够同时测量三个方向的微力Fx、Fy、Fz 和两个方向的微力矩Mx 和My;测力量程± 1N ,测力矩量程± 0 .0 5N·m ;放大电路集成在传感器的本体中。应用力学理论对本体进行理论分析 ,推导出计算公式 ,求出本体的应变 ;并采用有限元分析软件进行仿真 ,分析应变 ,确定了一种适用的静态非线性标定方法

Study on an integrated five-dimension micro force/torque sensor

The development of a five dimension micro force/torque sensor is described,which is used in the micromanipulation robot for measuring micro forces Fx , Fy , Fz and micro torques Mx, My simultaneously. Rated micro forces reach ±1N and rated micro torques reach ±0.05N·m. By the theory of mechanics, the equations to predict the bending strains under the forces or the torque are derived. The finite element method analysis for confirming the strains from the theoretical analysis is performed. A method of nonlinear calibration is also determined.