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电子束蒸发制备YBCO超导薄膜研究
引用本文:王连红,舒勇华,樊菁.电子束蒸发制备YBCO超导薄膜研究[J].低温与超导,2010,38(11).
作者姓名:王连红  舒勇华  樊菁
作者单位:中国科学院力学研究所,北京,100190
摘    要:采用电子束沉积制备YBCO超导薄膜,研究了760℃—840℃的不同退火温度下高温热处理对YBCO薄膜双轴织构、表面形貌及超导性能的影响。超导临界电流密度测试、X射线衍射(XRD)和扫描电镜(SEM)的结果表明,退火温度在在800℃时,YBCO薄膜具有良好的织构和平整致密的表面形貌,在77K自场下的临界电流密度J可达4.2×106/cm2。

关 键 词:YBCO  电子束沉积  超导薄膜

Study of YBCO films prepared by E-beam evaporation
Wang Lianhong,Shu Yonghua,Fan Jing.Study of YBCO films prepared by E-beam evaporation[J].Cryogenics and Superconductivity,2010,38(11).
Authors:Wang Lianhong  Shu Yonghua  Fan Jing
Affiliation:Wang Lianhong,Shu Yonghua,Fan Jing(The Key Laboratory of High Temperature Gas Dynamics,Institute of Mechanics,Chinese Academy of Sciences,Beijing 100190,China)
Abstract:Epitaxial YBCO superconducting films were deposited by E-beam evaporation on single crystalline LaAlO3(001)substrate,and microstructure and superconductivity of YBCO thin films were analyzed by X-ray diffraction,scanning electron micrograph and Jc scan system.We found that YBCO films fired at 800℃ have the best biaxial texture and Jc attached 4.2×106/cm2(77K,0T).
Keywords:YBCO  E-beam evaporation  Superconducting film  
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