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A New Approach on the Active Treatment for Electroless Copper Plating on Glass
引用本文:刘正春 肖鹏峰 等. A New Approach on the Active Treatment for Electroless Copper Plating on Glass[J]. 中国化学, 2003, 21(1): 1-3. DOI: 10.1002/cjoc.20030210102
作者姓名:刘正春 肖鹏峰 等
作者单位:KeyLaboratoryforMolecularandBio-molecularElectronicsofMinistryofEducation,Southeastuniversity,Nanjing,Jiangsu210096,China
基金项目:ProjectsupportedbytheNationalNaturalScienceFoundationofChina (No .60 0 710 0 1)
摘    要:A new method is described for the electroless deposition of copper onto glass.Commercially available glass slide was modified with γ-aminopropyltrimethoxysilane to form self-assembled monolayer (SAM) on it .Then it was dipped directly into PdCl2 solution instead of the conventional SnCl2 sensitization followed by PdCl2 activation.Experimental results showed that the Pd^2 ions from PdCl2 solution were coordinated to the amino groups on the glass surface resulting in the formation of N-Pd complex.In an electroless copper bath containin a formaldehyde reducing agent,the N-Pd complexes were reduced to Pd^0 atoms,which then acted as catalysts and initiated the deposition of copper metal.Although the copper deposition rate on SAM-modified glass was slow at the beginning,it reached to that of conventional method in about 5min.

关 键 词:铜 玻璃 化学镀 X射线光电子能谱 氯化锡溶液 镀层 形貌 结构 氯化钯溶液

A New Approach on the Active Treatment for Electroless Copper Plating on Glass
LIU,Zheng-Chun HE,Quan-Guo TANG,Jian-XinXIAO,Peng-Feng HE,Nong-Yue LU,Zu-Hong Key Laboratory for Molecular and Bio-molecular Electronics of Ministry of Education,Southeast University,Nanjing,Jiangsu ,China. A New Approach on the Active Treatment for Electroless Copper Plating on Glass[J]. Chinese Journal of Chemistry, 2003, 21(1): 1-3. DOI: 10.1002/cjoc.20030210102
Authors:LIU  Zheng-Chun HE  Quan-Guo TANG  Jian-XinXIAO  Peng-Feng HE  Nong-Yue LU  Zu-Hong Key Laboratory for Molecular  Bio-molecular Electronics of Ministry of Education  Southeast University  Nanjing  Jiangsu   China
Affiliation:LIU,Zheng-Chun HE,Quan-Guo TANG,Jian-XinXIAO,Peng-Feng HE,Nong-Yue LU,Zu-Hong Key Laboratory for Molecular and Bio-molecular Electronics of Ministry of Education,Southeast University,Nanjing,Jiangsu 210096,China
Abstract:A new method is described for the electroless deposition of copper onto glass. Commercially available glass slide was modified with μ‐amimopropyltrimethoxysilane to form self‐assembled monolayer (SAM) on it. Then it was dipped directly into PdCl2 solution instead of the conventional SnCl2 sensitization followed by PdCl2 activation. Experimental results showed that the Pd2+ ions from PdCl2 solution were coordinated to the ammo groups on the glass surface resulting in the formation of N—Pd complex. In an electroless copper bath containing a formaldehyde reducing agent, the N—Pd complexes were reduced to Pd0 atoms, which then acted as catalysts and initiated the deposition of copper metal. Although the copper deposition rate on SAM‐modified glass was slow at the beginning, it reached to that of conventional method in about 5 min.
Keywords:self-assembled monolayer   electroless copper plating   activation
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