电子束蒸发制备纳米ZnO薄膜及其特性研究

用电子束蒸发制备一系列纳米ZnO薄膜,用XRD和AFM研究其结构和形貌,重点研究其拉曼谱.ZnO靶的拉曼谱出现了4个明显的峰,与文献报道基本一致.室温下沉积的ZnO薄膜中存在大量缺陷和氧空位,其拉曼频移只有LO模和低频E2模,且其LO模有相对频移,峰展宽,强度加强.ZnO膜的高频拉曼谱对其结构不敏感,各种制备条件下的ZnO膜其高频拉曼谱基本一致.对拉曼谱,结合XRD和AFM分析给出了初步的解释.

Characteristic study of nano ZnO films prepared by electron beam evaporation

A series of nano ZnO films were prepared by electron beam evaporation.The structure and patterns of ZnO surface were studied by XRD and AFM,and the Raman spectrum was the emphasis of our paper.There were four peaks in the spectrum of ZnO target,which was consistent with the spectrum reported in the other papers.The spectrum of ZnO film had only two peaks corresponding to LO and E2 modes.The peak of LO mode had relative frequency shift,and its intensity and width both increase comparing with the spectrum of target,which showed that there were lots of defect and oxygen vacancies in the nano ZnO films fabricated by us with the substrate at room temperature.The Raman spectra of high range were not sensitive to the structure of ZnO films and the position of peaks appearing in the spectra of different ZnO films is very similar.Primary explanation was given to the Raman spectra with the analysis of XRD and AFM.