| ECR微波等离子体特性的实验研究 |
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| 引用本文： | 詹如娟,汪学毅,温晓辉,王存勇,朱小东.ECR微波等离子体特性的实验研究[J].真空科学与技术学报,1998(5). |
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| 作者姓名： | 詹如娟 汪学毅 温晓辉 王存勇 朱小东 |
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| 作者单位： | 中国科学技术大学结构分析开放实验室!合肥230026，中国科学技术大学近代物理系!合肥230026 |
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| 基金项目： | 国家自然科学基金!69493500 |
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| 摘 要： | 着重介绍采用一段真空波导耦合的ECR微波等离子体装置，以及在CH4－H2混合气体放电情况下，诊断了内部等离子体参数，给出了等离子体密度、电子温度、基板鞘附近的空间电位以及在类金刚石膜合成条件下等离子体中的基团情况，同时研究了它们与工艺参数之间的关系。
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| 关 键 词： | 电子回旋共振 等离子体诊断 微波 波导 |
Experimental Study of the Characteristics of ECR Microwave Plasma |
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| Zhan Rujuan, Wang Xueyi,Wen Xiaohui, Wang Cunyong, Zhu Xiaodong.Experimental Study of the Characteristics of ECR Microwave Plasma[J].JOurnal of Vacuum Science and Technology,1998(5). |
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| Authors: | Zhan Rujuan Wang Xueyi Wen Xiaohui Wang Cunyong Zhu Xiaodong |
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| Abstract: | The ECR microwave PCVD device with a vacuum waveguide connected was discussed. The plas-ma characteristics were experimentally studied with Langmuir probe, emission probe and ootical emission spec-troscopy,in the case of the CH4-H2 mixture discharging. The results showed that the radial distribution of the plasma density is neary uniform when ECR is positioned near the CVD chamber, and that the substrate sheath potential increases with an increasing negative bias voltage of the substrate. The contamination of the microwave pressure window can be effectively eliminated with the incorporation of a vacuum waveguide. |
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| Keywords: | Electron cyclotron resonance Plasma diagnosis Microwave Waveguide |
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