| 光学薄膜厚度实时监控系统检测电路设计 |
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| 引用本文： | 倪原,齐华,李锂. 光学薄膜厚度实时监控系统检测电路设计[J]. 探测与控制学报, 2004, 26(3): 62-64 |
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| 作者姓名： | 倪原 齐华 李锂 |
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| 作者单位： | 西安工业学院,陕西,西安,710032 |
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| 摘 要： | 提出了一种多层1/4波长膜系的薄膜厚度监控系统的检测电路的设计方法，该方法采用了以锁定放大器为核心的检测电路。根据锁定放大器的工作原理，提出了利用锁定放大器检测微弱信号的实验方法，并指出了影响测量的几个参数。
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| 关 键 词： | 监控 薄膜厚度 光学常数 |
| 文章编号： | 1008-1194(2004)03-0062-03 |
The Monitoring Control of Optical Thin-film Thickness |
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| NI Yuan,QI Hua,LI Li. The Monitoring Control of Optical Thin-film Thickness[J]. Journal of Detection & Control, 2004, 26(3): 62-64 |
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| Authors: | NI Yuan QI Hua LI Li |
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| Abstract: | A film thickness monitoring control method for quarter wave films is presented in this paper. By using this method, the optical constant of layer can be determined at the same process. This method can also be used to monitor the thickness of unquarter wave films according to the measurement of the film's reflectivity, and it has advantage of improving accuracy, increasing productivity and improving the film product quality. |
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| Keywords: | monitoring control thin-film thickness optical constant |
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