| 镁合金表面磁控溅射沉积铝膜的力学性能 |
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| 引用本文： | 张津,杨栋华,王东亚,欧信兵,王振林.镁合金表面磁控溅射沉积铝膜的力学性能[J].北京科技大学学报,2008,30(12). |
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| 作者姓名： | 张津 杨栋华 王东亚 欧信兵 王振林 |
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| 作者单位： | 1. 重庆工学院材料科学与工程学院,重庆,400050;北京科技大学材料科学与工程学院,北京,100083
2. 重庆工学院材料科学与工程学院,重庆,400050 |
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| 基金项目： | 教育部科学技术研究重点资助项目
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| 摘 要： | 采用直流磁控溅射法在镁合金上沉积铝膜,在高真空下对铝膜进行加热后处理. 用X射线衍射仪(XRD)分析膜层为纯铝多晶态,扫描电子显微镜(SEM)观察铝膜晶粒细小. 采用纳米压痕/划痕仪对铝膜的厚度、临界附着力、硬度和弹性模量进行了测试,并且用辉光放电光谱仪(GDS)测试了镁合金表面铝膜的成分和性能随薄膜深度的分布. 结果表明,铝膜的厚度随后处理温度的升高而降低,其表面硬度和弹性模量高于镁合金基体并且随深度增加而逐渐降低. 铝膜与镁合金基体间存在一个过渡层,结合良好且表现出一定的弹塑性能,有利于镁合金表面的防护.
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| 关 键 词： | 镁合金 磁控溅射 铝膜 力学性能 纳米划痕 纳米压痕 |
Mechanical properties of aluminum films on magnesium alloys by magnetron sputtering |
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| ZHANG Jin,YANG Donghua,WANG Dongya,OU Xinbing,WANG Zhenlin.Mechanical properties of aluminum films on magnesium alloys by magnetron sputtering[J].Journal of University of Science and Technology Beijing,2008,30(12). |
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| Authors: | ZHANG Jin YANG Donghua WANG Dongya OU Xinbing WANG Zhenlin |
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| Affiliation: | ZHANG Jin1,2),YANG Donghua1),WANG Dongya1),OU Xinbing1),WANG Zhenlin1)1)College of Materials Science & Engineering,Chongqing Institute of Technology,Chongqing 400050,China2)School of Materials Science , Engineering,University of Science , Technology Beijing,Beijing 100083,China |
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| Abstract: | A pure Al film was sputtered by DC magnetron on AZ31B magnesium alloy and heat-treated in a high vacuum.It was determined by the analyses of SEM and XRD that the Al film was ultra-fine polycrystalline.The thickness,critical adhesive force,hardness and elastic modulus of the Al film were measured by nano-indentation/scratch test;the composition profile and properties were tested by glow discharge spectrometry(GDS).The results show that the thickness of the Al film decreases with increasing heat treatment tem... |
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| Keywords: | magnesium alloys magnetron sputtering Al films mechanical properties nano-indentation nano-scratch |
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