A novel, single-mode piezoceramic plate actuator for ultrasonic linear motors |
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Authors: | Vyshnevskyy Oleksiy Kovalev Sergej Wischnewskiy Wladimir |
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Affiliation: | Physik Instrumente GmbH & Co. KG, auf der Roemerstrasse 1, D-76228 Karlsruhe, Germany. |
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Abstract: | A new type of piezoelectric plate actuator for ultrasonic linear motors has been developed. These new piezoelectric actuators use the principle of asymmetric resonant excitation of the piezoceramic plate in a special resonant mode consisting of a standing two-dimensional extensional wave in a piezoceramic plate. The behavior of the actuator has been simulated with finite-element method (FEM) software and the simulation results checked with single-point contact measurements on the surface of the actuator. This paper describes this work and closes by describing the new ultrasonic translation stages based on this design. |
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