| 基于阶跃响应的加速度计Q值测试方法研究 |
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| 引用本文： | 张灵霖,车录锋,李玉芳,王跃林.基于阶跃响应的加速度计Q值测试方法研究[J].传感技术学报,2009,22(10). |
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| 作者姓名： | 张灵霖 车录锋 李玉芳 王跃林 |
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| 作者单位： | 1. 中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海,200050;中国科学院研究生院,北京100049
2. 中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海,200050 |
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| 基金项目： | 国家863计划项目资助 |
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| 摘 要： | 随着电容式加速度传感器的广泛使用,对其品质因子、谐振频率等关键参数的器件级测试显得尤为重要.本文提出了一种简单有效的加速度计品质因子测试方法--阶跃响应测试法,详细分析了其测试原理及测试结果,并与传统的静电激励扫频测试法进行了对比.结果表明:两种测试方法中等效电刚度的不同,造成了测试结果的差异.
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| 关 键 词： | Q值 静电激励 阶跃响应 等效电刚度 |
Study on the Testing Method for the Quality Factor of Capacitive Accelerometer based on Step Response |
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| ZHANG Linglin,CHE Lufeng,LI Yufang,WANG Yuelin.Study on the Testing Method for the Quality Factor of Capacitive Accelerometer based on Step Response[J].Journal of Transduction Technology,2009,22(10). |
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| Authors: | ZHANG Linglin CHE Lufeng LI Yufang WANG Yuelin |
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| Affiliation: | ZHANG Linglin1,2,CHE Lufeng1,LI Yufang1,WANG Yuelin11.State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem , Information Technology,Chinese Academy of Sciences Shanghai 200050,China,2.Graduate University of the Chinese Academy of Sciences,Beijing 100049 |
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| Abstract: | With the wide range use of the capacitive accelerometer,it's particularly important to test some key parameters such as quality factor and resonance frequency accurately.A simple and effective method for testing Q factor of capacitive accelerometer based on step response has been presented.The basic testing principle and test results about the step response of accelerometer were discussed and analyzed.The paper also described a conventional testing method called electrostatic exciting-frequency sweeping det... |
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| Keywords: | quality factor electrostatic exciting step response effective stiffness constant |
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