MOVPE growth of strained InGaAs/lnAIAs MQWs for a polarization-insensitive electroabsorption modulator

Metalorganic vapor phase epitaxial growth of a strained InGaAs/lnAIAs multiquantum well (MQW) structure was carried out for optical electroabsorption modulators. A high-quality MQW layer can be grown by introducing compressive strain into InAlAs barrier layers against tensile-strained well layers. We have also demonstrated strained InGaAs/lnAIAs MQW electroabsorption modulators with polarization insensitivity by using these layers and have obtained a highquality modulator with a low driving voltage of 1.7 V and a wide 3-dB bandwidth of over 20 GHz.