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电涡流传感器热稳定性标定技术
引用本文:李国会,杨 媛,何忠武,田 飞,向汝建,徐宏来.电涡流传感器热稳定性标定技术[J].太赫兹科学与电子信息学报,2014,12(6):937-941.
作者姓名:李国会  杨 媛  何忠武  田 飞  向汝建  徐宏来
作者单位:a.Key Laboratory of Science and Technology on High Energy Laser;b.Institute of Applied Electronics,China Academy of Engineering Physics,Mianyang Sichuan 621999,China;a.Key Laboratory of Science and Technology on High Energy Laser;b.Institute of Applied Electronics,China Academy of Engineering Physics,Mianyang Sichuan 621999,China;a.Key Laboratory of Science and Technology on High Energy Laser;b.Institute of Applied Electronics,China Academy of Engineering Physics,Mianyang Sichuan 621999,China;a.Key Laboratory of Science and Technology on High Energy Laser;b.Institute of Applied Electronics,China Academy of Engineering Physics,Mianyang Sichuan 621999,China;a.Key Laboratory of Science and Technology on High Energy Laser;b.Institute of Applied Electronics,China Academy of Engineering Physics,Mianyang Sichuan 621999,China;a.Key Laboratory of Science and Technology on High Energy Laser;b.Institute of Applied Electronics,China Academy of Engineering Physics,Mianyang Sichuan 621999,China
基金项目:高能激光科学与技术重点实验室资助项目
摘    要:介绍电涡流传感器位移测量原理,分析温度变化时传感器线圈和探头热胀冷缩在测量位移过程中造成的温度漂移现象.针对传感器的温漂,研制出具有温度补偿功能的电涡流传感器热稳定性标定装置,对传感器输出电压进行温度补偿,减小温度变化对传感器输出电压的影响.同时介绍利用该装置进行温度标定的实现方法,并进行实验验证,实现固定位移条件下环境温度变化时对电涡流传感器输出电压的标定,与无温度补偿时输出电压对比,电压变化量减小了近50%.

关 键 词:电涡流传感器  温度漂移  温度补偿  热稳定性
收稿时间:2013/12/12 0:00:00
修稿时间:2014/3/10 0:00:00

Research on the test of temperature stability calibration device for eddy current sensor
LI Guo-hui,YANG Yuan,HE Zhong-wu,TIAN Fei,XIANG Ru-jian and XU Hong-lai.Research on the test of temperature stability calibration device for eddy current sensor[J].Journal of Terahertz Science and Electronic Information Technology,2014,12(6):937-941.
Authors:LI Guo-hui  YANG Yuan  HE Zhong-wu  TIAN Fei  XIANG Ru-jian and XU Hong-lai
Affiliation:LI Guo-hui,YANG Yuan,HE Zhong-wu,TIAN Fei,XIANG Ru-jian,XU Hong-lai.(a.Key Laboratory of Science and Technology on High Energy Laser;b.Institute of Applied Electronics,China Academy of Engineering Physics,Mianyang Sichuan 621999,China)
Abstract:The displacement detection principle of eddy current sensor is introduced. The temperature drifting phenomena occurred in measuring displacement are analyzed, which are caused by thermal expansion and contraction of sensor winding and detector. Referring to the temperature drifting of sensor, a calibrating device with compensating function of eddy current sensor is manufactured, and the temperature for output voltage of sensor is compensated, which reduces the influence of temperature changes on output voltage of sensor. The implementation method of temperature calibration by this device is proposed and validated in experiment, which realizes the calibration for output voltage of eddy current sensor under the circumstance temperature variation and fixed displacement. Comparing to the detection without temperature compensation, the variation of voltage decreases by about 50%.
Keywords:eddy current sensor  temperature drift  temperature compensation  thermal stability
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