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Indium tin oxide nanosized composite powder prepared using waste ITO target
作者姓名:LIU  Jiaxiang  GAN  Yong  ZENG  Shengnan
作者单位:The Key Laboratory for Science and Technology of Controllable Chemical Reactions, Ministry of Education, College of Materials Science andEngineering, Beijing University of Chemical Technology, Beijing 100029, China
基金项目:This work was financially supported by the National “863”program of China (No. 2004AA303542).
摘    要:Indium tin oxide (ITO) nano-particles were prepared directly using waste ITO target, which had been coated by magnetron controlled sputtering. The waste ITO target was cleaned with de-ionized water, and then dissolved in acid, filtrated, neutralized, manipulated through azeotropic distillation and finally dried, and in this way the precursor of indium tin hydroxide was obtained. The nanosized rio composite powder was prepared after the precursor heat-treated at 500℃ for 2 h. TEM images show a narrow distribution of particle size is 5-20 nm and the particle size can be controlled. Its granule has a spherical shape and the dispersion of the particle is well. X-ray diffraction (XRD) patterns indicate the only cubic In2O3 phase in the ITO powder hot-treated at 500℃. The purity of ITO composite powder is 99.9907%. The content of radium within filtrate was detected by using the EDTA titration of determination of indium in the ITO powder and ITO target. Appropriate amount of SnCl4.5H2O was dissolved in the filtrate, and then ITO powder containing 10 wt.% SnO2 was successfully prepared by heat-treating.

关 键 词:  氧化物  复合材料  热处理  球形颗粒  X光衍射
收稿时间:2004-10-29

Indium tin oxide nanosized composite powder prepared using waste ITO target
LIU Jiaxiang GAN Yong ZENG Shengnan.Indium tin oxide nanosized composite powder prepared using waste ITO target[J].Rare Metals,2005,24(3):277-282.
Authors:LIU Jiaxiang  GAN Yong  ZENG Shengnan
Abstract:Indium tin oxide (TTO) nano-particles were prepared directly using waste ITO target, which had been coated by magnetron controlled sputtering. The waste ITO target was cleaned with de-ionized water, and then dissolved in acid, filtrated, neutralized, manipulated through azeotropic distillation and finally dried, and in this way the precursor of indium tin hydroxide was obtained. The nanosized ITO composite powder was prepared after the precursor heat-treated at 500C for 2h. TEM images show a narrow distribution of particle size is 5-20 nm and the particle size can be controlled. Its granule has a spherical shape and the dispersion of the particle is well. X-ray diffraction (XRD) patterns indicate the only cubic In2O3 phase in the ITO powder heat-treated at 500C. The purity of ITO composite powder is 99.9907%. The content of indium within filtrate was detected by using the EDTA titration of determination of indium in the ITO powder and ITO target. Apfully prepared by heat-treating.
Keywords:waste ITO target  nanosized ITO composite powder  chemical technique  microstructure
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