零温下在布里渊区边界二维绝缘铁磁体的磁振子软化

在二维正方绝缘铁磁系统基础上建立一个磁振子-声子相互作用模型．利用格林函数方法研究磁振子-声子相互作用下的二维绝缘铁磁体的磁振子谱，计算布里渊区边界的主要对称点线上的磁振子色散曲线．发现在布里渊区边界区域磁振子谱的软化和磁振子谱线增宽最明显．比较纵向声子与横向声子对磁振子谱的软化与磁振子谱线增宽的影响，并讨论各项参数的变化对磁振子谱的软化与磁振子谱线增宽的影响．     

高效全固化钛宝石腔内倍频蓝光和四倍频紫外激光器的研究

用半导体抽运的Q开关YLF倍频激光器抽运钛宝石晶体，在平凹腔内加入组合的石英双折射滤光片压缩线宽，用LBO晶体腔内激发二次谐波，聚焦到BBO上产生四次谐波深紫外光。在抽运功率3．8w时，输出610mW．416nm蓝光。用长焦距的透镜聚焦二次谐波．得到64mW，208nm的紫外激光。基频光的谱线宽度是决定倍频效率的关键因素。实验观察到激光器的频谱宽度与双折射滤光片的带宽有一个数量级的差别，考虑到模式竞争和增益饱和效应，数值模拟了加入双折射滤光片后的钛宝石激光器的实际线宽，结果与实验中测量的数据基本一致。实验还分析了基频光的线宽对二次谐波效率的影响、二次谐波的线宽对四次谐波效率的影响、基频光的波长对四次谐波激发效率的影响。     

基于最小二乘拟合的不同探针测量线宽的比较

AFM探针的形貌和尺寸对纳米尺度线宽的测量有较大影响．首先建立了一个基于最小二乘的应用于AFM测量技术的线宽计量模型，并使用三种不同探针在NanoScopeⅢa型AFM上对设计线宽尺寸为1000nm的样本进行了测量．应用该模型和算法对线宽进行计算，揭示出探针尺寸对线宽测量结果的影响以及该模型对探针尺寸的依赖性．     

Three-dimensional image correction of tilted samples through coordinate transformation

In scanned probe measurements of micrometer- or nanometer-scale lines, it is nearly impossible to maintain the sample in a perfectly level position, and even a small amount of tilt can contribute to the accuracy of the result of the measure such as linewidth or step height. The current practice in image processing to deal with this problem is to conduct a line-by-line analysis to find the best fit of the substrate profile and subtract this background from all data points, thus describing 3D plane turns as a series of lines and processing them in succession in the x- or y-direction.In this paper a coordinate transformation method is proposed. The new coordinate system can be established on the basis of the inclined angle of the sample as well as the translation of three axes between the old coordinate system and the new coordinate system. The method can mathematically derive and hence correct all tilts around the x-, y- and z-axes and produce a leveled image simultaneously. Feature dimensions such as width, height, sidewall angle and pitch are calculated on the basis of simulated images using the coordinate transformation method and other methods. The result shows the advantage of the proposed method.     

Monte Carlo simulation of scanning electron microscope signals for lithographic metrology

Two computer codes for simulating the backscattered, transmitted, and secondary-electron signals from targets in a scanning electron microscope are described. The first code, MONSEL-II, has a model target consisting of three parallel lines on a three-layer substrate, while the second, MONSEL-III, has a model target consisting of a two-by-two array of finite lines on a three-layer substrate. Elastic electron scattering is determined by published fits to the Mott cross section. Both plasmon-generated electrons and ionized valence electrons are included in the secondary production. An adjustable quantity, called the residual energy loss rate, is added to the formula of Joy and Luo to obtain the measured secondary yield. The codes show the effects of signal enhancement due to edge transmission, known as blooming, as well as signal reduction due to neighboring lines, known as the “black-hole” effect.     

1.55 μm DFB LD光栅结构的优化设计

模拟分析了不同结构下二级光栅的特性,研究了光栅结构对分布分馈半导体激光器(DFB LD)空间烧孔以及光谱线宽的影响.最终给出优化后的光栅结构.优化后器件的阈值电流为11 mA,边模抑制比达到40 dB,最小线宽105 kHz,很好地抑制了空间烧孔效应.     

光反馈自混合干涉对称折叠算法的精度分析

为了提高对称折叠算法的精度,通过对仿真信号的测量,分析了影响算法精度的几种因素(光反馈水平因子,外腔的非线性运动,抽样速率和转折点的定位),并且给出了改进方法.仿真结果表明,在测量线宽展宽因子之前,需保证光反馈水平因子的准确测量,利用中间干涉条纹进行测量可以减少外腔非线性运动所带来的误差.这一结论对利用对称折叠算法处理实验信号有一定的帮助.     

低阈值光纤激光器稳频特性研究

为了实现低阈值光纤激光器的频率稳定输出,设计了环形腔光纤激光器,以光纤光栅作为波长选择元件,在未泵浦光纤饱和吸收体和其锥形化结构的协同作用下实现激光纵模选择,获得了短光纤饱和吸收体长度下的单纵模激光稳定输出。介绍了未泵浦光纤饱和吸收体选频原理和锥形结构滤波原理,实验研究了不同光纤饱和吸收体长度下激光纵模特性和波长稳定性,以及锥形化光纤饱和吸收体的激光输出特性。实验表明,引入锥形化结构的饱和吸收体后,激光器能够稳定输出1545 nm波长的单纵模激光,并有效降低光纤激光器阈值至7.58 mW,采用延迟自外差方法测得该光纤激光器的线宽小于8 kHz。     

双折射率色散效应对液晶可调光衰减器的影响

文章利用Jones矩阵方法计算和分析了双折射率色散效应对一种液晶可调光衰减器(VOA)衰减能力的影响.结果表明,当激光谱线宽度较窄时,双折射率色散效应将导致液晶VOA的光衰减能力大幅度减弱;反之,双折射率色散效应对液晶VOA光衰减能力的影响可以忽略,但液晶VOA本身的光衰减能力很低.因此,液晶VOA适用于较窄线宽的激光光源,在设计和使用时应充分考虑液晶双折射率色散效应对其光衰减能力的影响.     

值得重视的田口式参数设计法

本文着重论述了田口式参数设计法在半导体制造中对线宽的质量控制.通过田口式参数设计法,可以优化线宽控制对光刻过程步骤中的可控参数的条件,以便将不可控因素的影响降到最低.