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Suga M Nishiyama H Konyuba Y Iwamatsu S Watanabe Y Yoshiura C Ueda T Sato C 《Ultramicroscopy》2011,111(12):1650-1658
Although conventional electron microscopy (EM) requires samples to be in vacuum, most chemical and physical reactions occur in liquid or gas. The Atmospheric Scanning Electron Microscope (ASEM) can observe dynamic phenomena in liquid or gas under atmospheric pressure in real time. An electron-permeable window made of pressure-resistant 100 nm-thick silicon nitride (SiN) film, set into the bottom of the open ASEM sample dish, allows an electron beam to be projected from underneath the sample. A detector positioned below captures backscattered electrons. Using the ASEM, we observed the radiation-induced self-organization process of particles, as well as phenomena accompanying volume change, including evaporation-induced crystallization. Using the electrochemical ASEM dish, we observed tree-like electrochemical depositions on the cathode. In silver nitrate solution, we observed silver depositions near the cathode forming incidental internal voids. The heated ASEM dish allowed observation of patterns of contrast in melting and solidifying solder. Finally, to demonstrate its applicability for monitoring and control of industrial processes, silver paste and solder paste were examined at high throughput. High resolution, imaging speed, flexibility, adaptability, and ease of use facilitate the observation of previously difficult-to-image phenomena, and make the ASEM applicable to various fields. 相似文献
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本文研制了高性能的AlGaN/GaN高电子迁移率晶体管并进行了特性分析。诸如氮化铝插入层、氮化硅钝化、高宽窄比的T型栅、减小欧姆接触电阻和缩短漏源距离等技术被用于提高器件性能。使用半导体参数分析仪和矢量网络分析仪分别对前制器件的直流和交流特性进行了表征。所得80nm栅长的器件其最大漏极电流密度为1.41A/mm,该结果为到目前为止国内文献报道的最大值。同时测得峰值跨导为317mS/mm,特征频率为74.3GHz,最高振荡频率为112.4GHz。 相似文献
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本文对SiH_4-N_2系PECVD氮化硅-硅界面陷阱进行了研究.结果表明:MNS结构的C-V特性有滞后效应,滞后宽度随测试条件而变化;界面陷阱密度随淀积条件变化。 相似文献
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Suyeon Kim 《Thin solid films》2010,518(22):6554-6557
Using a pulsed-plasma enhanced chemical vapor deposition system, silicon nitride films were deposited at room temperature. A refractive index was examined in the range of bias power and duty ratio, 200-800 W and 40-90%, respectively. Ion energy diagnostics was related to the refractive index. The refractive index decreased with decreasing the duty ratio at all powers but 800 W. For all the duty variations at all powers but 200 W, the refractive index was strongly correlated with the ion energy flux. The refractive index varied between 1.662 and 1.817. Using a neural network model, the refractive index was optimized. 相似文献
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E. Fourmond R. Bilyalov E. Van Kerschaver M. Lemiti J. Poortmans A. Laugier 《Solar Energy Materials & Solar Cells》2002,72(1-4)
This work intends to compare two different passivation methods for electromagnetically continuous pulling silicon (EMCP): remote plasma hydrogenation and remote plasma enhanced CVD of SiN followed by high-temperature sintering. All experiments are carried out on textured and non-textured EMCP samples from the same ingot. To check the effect of high-temperature diffusion on EMCP, a n+-emitter is formed on one group of the samples using POCl3 diffusion. Passivation capabilities of both techniques are checked using measurements of minority carrier lifetime by means of microwave photoconductance decay mapping. Solar cells are made to compare lifetime measurement with cell parameters. 相似文献
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SiON/SiN太阳电池双层减反膜的性能研究 总被引:1,自引:1,他引:1
报道了用电子回旋共振化学气相沉淀积技术淀积SiON/SiN双层硅太阳电池减反膜的实验研究。用红外吸收谱,俄歇电子谱以及二次离子质谱等实验方法对薄膜的组分,结构2,界面过渡区的特性以及膜层中的氢分布进行了分析,实验表明:在制备减反射膜中,要获得较佳的减反效果,应尽量降低淀积温度,增大微波功率。 相似文献
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