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1.
Zs. T
kei D. Kelleher B. Mebarki T. Mandrekar S. Guggilla K. Maex 《Microelectronic Engineering》2003,70(2-4):358-362
Passivated single damascene copper SiO2 damascene lines were evaluated in combination with TiSiN and Ta(N)/Ta diffusion barriers. Leakage current, breakdown and time-dependent dielectric breakdown properties were investigated on a wafer level basis for temperatures ranging between room temperature and 150 °C. It is found that the leakage performance of the wafers with a TiSiN barrier is better at room temperature, but at 150 °C the performance levels out with Ta(N)/Ta. Time-dependent dielectric breakdown measurements at 150 °C show that the lifetime of the interconnect is higher with the selected Ta(N)/Ta barrier than for TiSiN. 相似文献
2.
A method of measuring and identifying the static parameters of a bipolar transistor is considered. The characteristic of the transistor, from which the parameters of the model are determined, is chosen depending on what group the calculated parameters belong to. The characteristics are measured in such a way that the equations of the model describing them can be reduced to the simplest form. 相似文献
3.
基于模式理论光栅椭偏参数反演的数值模拟 总被引:5,自引:2,他引:3
将一种广泛用于求解系统优化问题的方法——正单纯形法,求解光栅的椭偏方程。首先,利用求解光栅的傅立叶模式理论对TE和TM波的复反射系数进行求解。然后计算出其相应的椭偏参数(△,Ψ),并在该值的基础上加入不同偏差的随机高斯噪声,将加入噪声后的值(△m,Ψm)作为模拟测量值。最后使用优化算法进行反演。通过对几种常用面形光栅椭偏参数的数值模拟,一方面表明傅立叶模式理论计算光栅的椭偏参数不仅精度高。而且速度快;另一方面表明利用正单纯形法得到的光栅参数值很接近于正演时假设的参数值,从而从理论上证明了利用椭偏法测量光栅各种光学参数的可行性。 相似文献
4.
钻井参数仪的模块化设计方法研究 总被引:1,自引:0,他引:1
文章以模块化设计原理为基础,讨论了钻井参数仪的模块划分,模块化设计准则和主要设计内容。采用模块化设计方法、现场设备网络的开放网络和现场总线解决方案设计的钻井参数仪,具有传输信号稳定、可靠性高、抑制噪声能力强、组建现场网络成本低等特点。 相似文献
5.
6.
Particles and gases can deposit from the atmosphere to polar snow by several mechanisms. Dry deposition can be considered to consist of three steps: aerodynamic transport from the free atmosphere to the viscous sublayer near the surface, boundary layer transport across the sublayer, and interactions with the surface. The particle dry deposition mass flux is dominated by the largest particles present in a size distribution. Wet deposition includes in-cloud and below-cloud scavenging, where the former refers to uptake of particles during nucleation of cloudwater as well as scavenging of particles and gases by existing droplets and ice crystals. Of all the wet deposition mechanisms, nucleation scavenging is often the most important mechanism for particles in the polar regions. Finally, incorporation of particles and gases into fog droplets and subsequent settling of the fog to the snow surface can be an important removal process in regions of frequent fog. For Summit, Greenland, the total deposition of MSA, SO42-, Na+, K+, and Ca2+ during May 24-July 13, 1993 was dominated by wet deposition: this mechanism accounted for an average of 62% of the total deposition for these species. Fog and dry deposition accounted for 21% and 17% of the total, respectively. These results suggest that all three mechanisms may need to be considered when estimating total deposition of certain chemical species to polar snow. 相似文献
7.
Bimolecular hydrogen transfer and skeletal isomerization the important secondary reac-tions among catalytic cracking reactions,which affect product yield distribution and product quality,Catalyst properties and operating parameters have great impact on bimolecular hydrogen transfer and skeletal isomerization reactions .Bimolecular hydrogen transfer activity and skeletal isomrization activity of USY-containing catalysts are higher thn that of ZSM-5-containing catalyst.Coke deposition on the active sites of catalyst may suppress bimolecular hydrogen transfer activity and skeletal isomer-ization activity of catlys in different degrees.Short raction time causes a decrease of hydrogen trans-fer reaction,but and increase of skeletal isomerization reaction compared to cracking reaction in catalytic cracking process. 相似文献
8.
ABSTRACT: Texture changes during ripening of Port Salut Argentino cheese for different sampling zones were studied. Compression relaxation tests were performed and results were analyzed using both Maxwellian and Peleg's models. Elastic equilibrium modulus obtained from the Maxwellian model decreased from 1.22 to 0.11 104 Pa during ripening. The constants derived from Peleg's model, k1 and k2 , diminished with ripening time from 1.18 to 0.71 min and from 1.27 to 1.12, respectively. Asymptotic equilibrium modulus from Peleg's model decreased from 0.95 to 0.07 104 Pa during ripening. Rate parameters derived from a 1st order kinetics applied to both equilibrium moduli showed that the decrease was faster in the external zone (0.0846 d−1 ) than in the central zone (0.0368 d−1 ). The correlation between equilibrium moduli, salt concentration, moisture content, and maturation indexes was obtained with a determination coefficient of 0.76. 相似文献
9.
碳/碳复合材料CVI工艺中热解碳形成机理的研究 总被引:1,自引:1,他引:0
对碳碳复合材料CVI或(CVD)工艺中热碳组织的类型,沉积机理等研究情况进行了简要的综述,并对其进一步研究提出了相应观点。 相似文献
10.
化学镀非晶态Ni—B合金的研究 总被引:1,自引:0,他引:1
本文通过化学镀方法在铜和钢上沉积非晶态Ni-B合金。着重讨论了还原剂浓度、络合剂浓度对化学镀沉积速率的影响;分析了它的耐蚀原因和其显微硬度随退火温度的变化情况并就其应用和发展略作说明。 相似文献