表面高分辨弹性反冲探测分析

在中国原子能科学研究院 HI- 1 3串列加速器上建立了用 Q3D磁谱仪动量分析和ΔE- E粒子分辨对材料表面进行高分辨的弹性反冲探测分析技术 .用 1 0 0 Me V12 7I对 C/Li F多层样品的深度分布分析表明 ,表面分辨达到 1 .2 nm.所建立的ΔE(气体 ) - E(半导体 )望远镜探测器可同时分析从轻至中重的所有元素 .实测了新光电材料 Ga N,La2 Sr Cu O4 超导膜和新超硬材料 C3N4 (Si)等样品. High resolution depth profiling technique with elastic recoil detection analysis has been developed at the HI 13 tandem accelerator of CIAE. A depth resolution of 1.2 nm was achieved at the surface of the samples with the Q3D magnetic spectrometer and the focal plane detector. From light to medium heavy elements were simultaneous analyzed with a small Δ E E telescope. The method was applied to depth profile analysis of C/LiF multilayers, La 2SrCuO 4 superconductor and GaN foil samples.